The effect of nitric oxide anneals on silicon vacancies at and very near the interface of 4H SiC metal oxide semiconducting field effect transistors using electrically detected magnetic resonance

Cochrane, C. J.; Lenahan, P. M.; Lelis, A. J.
May 2013
Applied Physics Letters;5/13/2013, Vol. 102 Issue 19, p193507
Academic Journal
We use three electrically detected magnetic resonance (EDMR) approaches to explore nitric oxide (NO) annealing in 4H SiC metal-oxide-semiconductor field-effect transistors (MOSFETs). One approach is sensitive to defects at the interface and those extending into the SiC. Two of these approaches are particularly sensitive to SiC/SiO2 interface defects. They show that NO anneals decrease the EDMR response. Since this and earlier studies indicate the ubiquitous presence of silicon vacancy centers in SiC MOSFETs, our results provide strong circumstantial evidence that these defects play an important role in limiting device performance and that NO anneals are effective in reducing their populations.


Related Articles

  • Instability of the two-dimensional metallic phase to a parallel magnetic field. Pudalov, V. M.; Brunthaler, G.; Prinz, A.; Bauer, G. // JETP Letters;6/25/97, Vol. 65 Issue 12, p932 

    Magnetotransport studies of the unusual two-dimensional metallic phase in high-mobility Si-MOS structures are reported. It is found that a magnetic field applied in the 2D plane suppresses the metallic state, causing the resistivity to increase dramatically (by more than 30 times). The total...

  • Targeted Herceptin—dextran iron oxide nanoparticles for noninvasive imaging of HER2/neu receptors using MRI. Ting-Jung Chen; Tsan-Hwang Cheng; Chiao-Yun Chen; Hsu, Sodio C. N.; Tian-Lu Cheng; Gin-Chung Liu; Yun-Ming Wang // Journal of Biological Inorganic Chemistry;Feb2009, Vol. 14 Issue 2, p253 

    A novel magnetic resonance imaging (MRI) contrast agent containing Herceptin is reported. The surfaces of superparamagnetic iron oxide nanoparticles were modified with dextran and conjugated with Herceptin (Herceptin–nanoparticles) to improve their dispersion, magnetization, and targeting...

  • Analysis and control of the Hanle effect in metal-oxide-semiconductor inversion channels. Takamura, Yota; Sugahara, Satoshi // Journal of Applied Physics;Apr2012, Vol. 111 Issue 7, p07C323 

    The authors theoretically analyzed the output characteristics of a proposed Hanle-effect spin transistor based on a spin-MOSFET. The device can easily create oscillating Hanle-effect signals by applying an accelerating bias voltage. The behavior of the magnetic field interval of the oscillatory...

  • Optical Third-Harmonic Generation in Coupled Microcavities Based on Porous Silicon. Gusev, D. G.; Martemyanov, M. G.; Soboleva, I. V.; Dolgova, T. V.; Fedyanin, A. A.; Aktsipetrov, O. A. // JETP Letters;11/10/2004, Vol. 80 Issue 9, p633 

    The resonance features of the third-harmonic generation have been observed in 1D coupled microcavities consisting of three Bragg reflectors and two identical half-wave layers of mesoporous silicon. The third-harmonic intensity increases by a factor of about 103 in the resonance of fundamental...

  • Study of electronic and magnetic properties of the CuFeS2 semiconductor compound in the temperature range 77�300 K. Khabibullin, I.; Schmidt, E.; Matukhin, V. // Semiconductors;Dec2009, Vol. 43 Issue 13, p1650 

    The conductivity of polycrystalline chalcopyrite (CuFeS2) samples is studied in the temperature range 77�300 K. Some differences in the low-temperature behavior of the conductivity in different samples are observed. The nuclear magnetic resonance spectrum of Cu in the local field in CuFeS2...

  • Magnetic resonance in multilayer Gd/Si/Co magnetic films. Patrin, G. S.; Vas'kovskii, V. O.; Svalov, A. V.; Eremin, E. V.; Panova, M. A.; Vasil'ev, V. N. // Journal of Experimental & Theoretical Physics;Jan2006, Vol. 102 Issue 1, p131 

    The magnetic properties of multilayer Gd/Si/Co magnetic films are experimentally studied by electron magnetic resonance and analyzed theoretically. The introduction of a semiconductor silicon interlayer is found to substantially affect the magnetic interlayer coupling and the magnetic dynamics...

  • Structural imperfections and magnetoresistive properties of the ceramic La0.6Sr0.2Mn1,2-xFexO3±δ. Pashchenko, V. P.; Shemyakov, A. A.; Pashchenko, A. V.; Prokopenko, V. K.; Revenko, Yu. F.; Turchenko, V. A.; Varyukhin, V. N.; D'yakonov, V. P.; Szymczak, H. // Low Temperature Physics;Aug2007, Vol. 33 Issue 8, p663 

    The x-ray structural, resistive, magnetic, and 55Mn NMR methods are used to investigate the ceramic magnetoresistive lanthanum manganite perovskites La0.6Sr0.2Mn1,2-xFexO3 (x=0, 0.02, 0.05, and 0.1) annealed at 1170 and 1500 °C. It is found that increasing the Fe content decreases the...

  • Large magnetoresistances and non-Ohmic conductivity in EuWO1+xN2-x. Kusmartseva, A.; Yang, M.; Oró-Solé, J.; Bea, A. M.; Fuertes, A.; Attfield, J. P. // Applied Physics Letters;7/13/2009, Vol. 95 Issue 2, p022110 

    The magnetic field and voltage dependent electronic transport properties of EuWO1+xN2-x ceramics are reported. Large negative magnetoresistances are observed at low temperatures, up to 70% in the least doped (x=0.09) material. Non-Ohmic conduction emerges below the 12 K Curie transition. This is...

  • Optical switching of a metamaterial by temperature controlling. Wan-xia Huang; Xiao-gang Yin; Cheng-ping Huang; Qian-jin Wang; Teng-fei Miao; Yong-yuan Zhu // Applied Physics Letters;6/28/2010, Vol. 96 Issue 26, p261908 

    We have fabricated a metamaterial of metal/semiconductor/metal sandwich nanostrips structure comprising a pair of gold strips and a vanadium dioxide (VO2) strip. The optical response of the metamaterial has been studied. The results indicate the nanostructure with VO2 strips can be used as a...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics