Visible-light photoresponse of AlN-based film bulk acoustic wave resonator

Zhou, C. J.; Yang, Y.; Shu, Y.; Cai, H. L.; Ren, T. L.; Chan, M.; Zhou, J.; Jin, H.; Dong, S. R.; Yang, C. Y.
May 2013
Applied Physics Letters;5/13/2013, Vol. 102 Issue 19, p191914
Academic Journal
Visible-light photoresponse of an AlN-based film bulk acoustic wave resonator (FBAR) is demonstrated. It is found that the FBAR exhibits a resonant frequency downshift under purple light illumination and the magnitude of the frequency downshift increases as the power density increases within the range of 5-40 mW/cm2. A resonant frequency downshift of 1313 KHz is observed under 40 mW/cm2 illumination, corresponding to a minimum detection power of 6.09 nW. A sub-bandgap photoresponse of the AlN thin film is proposed to explain this phenomenon.


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