TITLE

Electrical performance of monolayer MoS2 field-effect transistors prepared by chemical vapor deposition

AUTHOR(S)
Amani, Matin; Chin, Matthew L.; Birdwell, A. Glen; O'Regan, Terrance P.; Najmaei, Sina; Liu, Zheng; Ajayan, Pulickel M.; Lou, Jun; Dubey, Madan
PUB. DATE
May 2013
SOURCE
Applied Physics Letters;5/13/2013, Vol. 102 Issue 19, p193107
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Molybdenum disulfide (MoS2) field effect transistors (FET) were fabricated on atomically smooth large-area single layers grown by chemical vapor deposition. The layer qualities and physical properties were characterized using high-resolution Raman and photoluminescence spectroscopy, scanning electron microscopy, and atomic force microscopy. Electronic performance of the FET devices was measured using field effect mobility measurements as a function of temperature. The back-gated devices had mobilities of 6.0 cm2/V s at 300 K without a high-κ dielectric overcoat and increased to 16.1 cm2/V s with a high-κ dielectric overcoat. In addition the devices show on/off ratios ranging from 105 to 109.
ACCESSION #
87655889

 

Related Articles

  • High integrity metal/organic device interfaces via low temperature buffer layer assisted metal atom nucleation. Maitani, Masato M.; Allara, David L.; Ohlberg, Douglas A. A.; Li, Zhiyong; Williams, R. Stanley; Stewart, Duncan R. // Applied Physics Letters;4/26/2010, Vol. 96 Issue 17, p173109 

    The ability to generate sharp, high integrity metal/organic film interfaces is demonstrated by the use of a buffer layer of Xe condensate during the vapor deposition of Au atoms onto a CH3(CH2)11S-/Au{111} self-assembled monolayer (SAM), a normally highly permeable film for the metal atoms in...

  • Local conductance measurement of graphene layer using conductive atomic force microscopy. Ahmad, Muneer; Han, Sang A.; Tien, D. Hoang; Jung, Jongwan; Seo, Yongho // Journal of Applied Physics;Sep2011, Vol. 110 Issue 5, p054307 

    This paper reports the local conductivity mapping of graphene films prepared by chemical vapor deposition and mechanical exfoliation with the help of atomic force microscope where a conducting tip scanned the graphene surface with bias voltage. The surface morphology measured by field emission...

  • The Formation of Nanocrystalline Diamond Coating on WC Deposited by Microwave Assisted Plasma CVD. Toff, M. R. M.; Hamzah, E.; Purniawan, A. // AIP Conference Proceedings;Mar2010, Vol. 1217 Issue 1, p500 

    Diamond is one form of carbon structure. The extreme hardness and high chemical resistant of diamond coatings determined that many works on this area relate to coated materials for tribological applications in biomedicine, as mechanical seals or cutting tools for hard machining operations. In...

  • Detrimental influence of catalyst seeding on the device properties of CVD-grown 2D layered materials: A case study on MoSe2. Utama, M. Iqbal Bakti; Xin Lu; Yanwen Yuan; Qihua Xiong // Applied Physics Letters;12/22/2014, Vol. 105 Issue 25, p253102-1 

    Seed catalyst such as perylene-3,4,9,10-tetracarboxylic acid tetrapotassium (PTAS) salt has been used for promoting the growth of atomically thin layered materials in chemical vapor deposition (CVD) synthesis. However, the ramifications from the usage of such catalyst are not known...

  • Room-temperature chemical vapor deposition and mass detection on a heated atomic force microscope cantilever. Sunden, Erik O.; Wright, Tanya L.; Lee, Jungchul; King, William P.; Graham, Samuel // Applied Physics Letters;1/16/2006, Vol. 88 Issue 3, p033107 

    This letter reports the localized room-temperature chemical vapor deposition of carbon nanotubes (CNTs) onto an atomic force microscope cantilever having an integrated heater, using the cantilever self-heating to provide temperatures required for CNT growth. Precise temperature calibration of...

  • High quality AlN grown on SiC by metal organic chemical vapor deposition. Chen, Z.; Newman, S.; Brown, D.; Chung, R.; Keller, S.; Mishra, U. K.; Denbaars, S. P.; Nakamura, S. // Applied Physics Letters;11/10/2008, Vol. 93 Issue 19, p191906 

    Growth conditions for AlN in two dimensional (2D) and three dimensional (3D) growth modes were explored on SiC using metal organic chemical vapor deposition. High quality AlN layers were obtained by alternating between 3D and 2D growth modes, referred to as modulation growth (MG). Long parallel...

  • Single crystal diamond tips for scanning probe microscopy. Obraztsov, Alexander N.; Kopylov, Petr G.; Loginov, Boris A.; Dolganov, Mathew A.; Ismagilov, Rinat R.; Savenko, Natalia V. // Review of Scientific Instruments;Jan2010, Vol. 81 Issue 1, p013703 

    Single crystal diamond tips with perfect pyramidal geometry were obtained by a combination of chemical vapor deposition and selective oxidation of polycrystalline films. The parameters of the deposition process were chosen to provide growth of a textured film consisting of micrometer sized...

  • The surface morphological evolution of ultrathin SiC buffer layer grown on Si (100) substrate by atmospheric pressure chemical vapor deposition. Shi, Biao; Zhu, Ming-Xing; Liu, Xue-Chao; Yang, Jian-Hua; Shi, Er-Wei // Journal of Materials Research;Jan2013, Vol. 28 Issue 1, p113 

    Ultrathin SiC buffer layers have been grown on Si (100) substrates by atmospheric pressure chemical vapor deposition. The evolution of buffer layer morphological properties as a function of carbonization parameters is investigated by atomic force microscopy. Based on the quantitative analysis of...

  • Simultaneous short-range smoothening and global roughening during growth of hydrogenated amorphous silicon films. Sperling, Brent A.; Abelson, John R. // Applied Physics Letters;10/18/2004, Vol. 85 Issue 16, p3456 

    We investigate the evolution of surface morphology during hot-wire chemical vapor deposition of amorphous silicon films onto rough substrates. Using in situ spectroscopic ellipsometry, we find that the surface smoothens as the film grows. However, postdeposition atomic force microscopy reveals...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics