TITLE

Breakdown of the approximations of small perturbations in continuum modeling of amorphous thin film growth

AUTHOR(S)
Streng, C.; Samwer, K.; Mayr, S. G.
PUB. DATE
December 2002
SOURCE
Applied Physics Letters;12/30/2002, Vol. 81 Issue 27, p5135
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Morphology evolution of thin film growth can be quantitatively modeled by employing rate equations for two-dimensional, single-valued functions within a treatment of small perturbations. This description can be expected to be valid in an intermediate film thickness regime, where substrate influences and three-dimensional effects are minor. The breakdown of the mathematical description in its upper film thickness limit is systematically investigated by a detailed comparison of experiments and simulation. Possible reasons for the failure are discussed and improvements are suggested.
ACCESSION #
8737949

 

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