Hundred-micron-sized all-solid-state Li secondary battery arrays embedded in a Si substrate

Kushida, K.; Kuriyama, K.; Nozaki, T.
December 2002
Applied Physics Letters;12/23/2002, Vol. 81 Issue 26, p5066
Academic Journal
Fabrication and charge/discharge behaviors of all-solid-state Li secondary battery arrays embedded into three Si trenches of 200 × 100 μm² in area and 0.5∼2.0 μm in depth are presented. The battery arrays in a Si wafer, consisting of multiple layers (A1 current collector/Li/SiO[sub 2]-15 at. %P[sub 2]O[sub 5]/LiMn[sub 2]O[sub 4]/polycrystalline silicon current collector), are prepared by combining a sol-gel spin-coating method and Si very-large-scale integration technologies. Porous spin-on glass (SiO[sub 2]-15 at. %P[sub 2]O[sub 5]) is adopted as an electrolyte layer, in which spatial paths for Li[sup +] ions are artificially introduced into the glass. Each active battery area is isolated with double insulating walls (Si[sub 3]N[sub 4]/SiO[sub 2]). The battery arrays demonstrate a constant capacity of ∼9.2 μAhcm[sup -2] at ∼3.6 V up to 100 cycles.


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