TITLE

Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance

AUTHOR(S)
Hung, Vu Ngoc; Abe, Takashi; Minh, Phan Ngoc; Esashi, Masayoshi
PUB. DATE
December 2002
SOURCE
Applied Physics Letters;12/23/2002, Vol. 81 Issue 26, p5069
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A miniaturized highly sensitive single-chip multichannel quartz-crystal microbalance prepared by deep reactive ion etching is presented. In the present work, quartz resonators in a single-chip with the diameters in the range 0.05-1.0 mm and thicknesses in the range 18-82 μm were fabricated. The conductance measurements carried out on the resonators showed that the Q factor is inversely proportional to resonator thickness. The Q-factor value as high as ∼30 000 has been observed in case of a 94 MHz resonator whose diameter is 1 mm and the thickness 17.8 μm. The Q factor of a resonator of very small diameter (0.1 mm) reached the value 5700.
ACCESSION #
8691513

 

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