TITLE

Modeling of an axially inhomogeneous microwave argon plasma column at a moderate pressure

AUTHOR(S)
Benova, E.; Petrova, Ts.; Blagoev, A.; Zhelyazkov, I.
PUB. DATE
July 1998
SOURCE
Journal of Applied Physics;7/1/1998, Vol. 84 Issue 1, p147
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Provides information on theoretical results for axial distributions of excited atoms and charged particles in an axially inhomogenous microwave sustained argon plasma column at a pressure of 1.8 Torr. Description of the electrodynamic part of the model; Information on the mean power required for sustaining an electron-ion pain in the discharge of the electron number; Conclusion reached on the presentation.
ACCESSION #
867716

 

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