Depth profiling of Si nanocrystals in Si-implanted SiO[sub 2] films by spectroscopic ellipsometry

Chen, T. P.; Liu, Y.; Tse, M. S.; Ho, P. F.; Dong, Gui; Fung, S.
December 2002
Applied Physics Letters;12/16/2002, Vol. 81 Issue 25, p4724
Academic Journal
In this letter, we report an approach to depth profiling of Si nanocrystals embedded in SiO[sub 2] film based on spectroscopic ellipsometry. The SiO[sub 2] film is divided into many sublayers with equal thickness, and each sublayer is characterized by its nanocrystal concentration. In the spectral fittings, the effective dielectric function of each sublayer is obtained from an effective medium approximation by using the dielectric function of Si nanocrystal that is calculated with either the bond contraction or the phenomenological models for the band gap expansion of nanocrystals. The fittings yield the nanocrystal depth profiles and the nanocrystal sizes as well. The depth profiles from the two models are similar, and they are in good agreement with secondary ion mass spectroscopy analysis.


Related Articles

  • Crystallization of thin-film Si monitored in real time by in-situ spectroscopic techniques. Stradins, P.; Teplin, C. W.; Young, D. L.; Yan, Y.; Branz, H. M.; Wang, Q. // Journal of Materials Science: Materials in Electronics;Oct2007 Supplement, Vol. 18, p309 

    We have developed optical techniques for real-time, in-situ monitoring of crystallization and epitaxial growth of silicon. Real-time spectroscopic ellipsometry is used for evaluating epitaxial growth during hot-wire CVD (HWCVD) reveals the thickness at which epitaxy fails and amorphous cones...

  • Perspective on Water of Crystallization Affecting the Functionality of Pharmaceuticals. Fang Tian; Rantanen, Jukka // Food Biophysics;Jun2011, Vol. 6 Issue 2, p250 

    Water can be incorporated into crystalline lattice of organic molecules in several ways and thus forms systems with different molecular packing characteristics. This review outlines a general classification of hydrates and explains why it is of high relevance for pharmaceutical researchers to...

  • a-Si:H/c-Si heterointerface formation and epitaxial growth studied by real time optical probes. Gielis, J. J. H.; van den Oever, P. J.; van de Sanden, M. C. M.; Kessels, W. M. M. // Applied Physics Letters;5/14/2007, Vol. 90 Issue 20, p202108 

    The deposition of amorphous and epitaxial silicon thin films on H-terminated Si(100) has been studied in real time by the simultaneous application of spectroscopic ellipsometry, attenuated total reflection infrared spectroscopy, and optical second-harmonic generation. The morphology development...

  • Optical index profile of nonuniform depth-distributed silicon nanocrystals within SiO2. Barba, D.; Dahmoune, C.; Martin, F.; Ross, G. G. // Journal of Applied Physics;Jan2009, Vol. 105 Issue 1, p013521 

    Optical properties of silicon nanocrystals (Si-ncs) prepared by silicon implantation into silicon oxide have been investigated by photoluminescence measurements and spectroscopic ellipsometry. The dielectric function associated with Si-nc uniformly and nonuniformly depth distributed has been...

  • Spectroscopic investigations on the structure of tin-silica glass ceramic systems doped with rare earth ions. Tran, T. V.; Kinowski, C.; Cristini, O.; Capoen, B.; Bouazaoui, M.; Roussel, P.; Berneschi, S.; Righini, G.; Ferrari, M.; Bhaktha, S. N. B.; Turrell, S. // AIP Conference Proceedings;8/6/2010, Vol. 1267 Issue 1, p1170 

    The article focuses on the study conducted to examine the effects of doping by rare earth ions such as Eu3+ and Er3+ on the structure of the of tin-silica glass ceramic systems. It states that the experiment was carried out with spectroscopic investigations using Raman, Photoluminescence and XRD...

  • Spectroscopic Studies of Electronically Active Defects in Transition Metal Oxides for Advanced Si Devices. Lucovsky, Gerald; Lüning, Jan // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p364 

    Based on spectroscopic studies, and guided by ab initio theory, the electron and hole traps in HfO2 and other transition metal elemental oxides e.g., TiO2, are assigned to O-atom divacancies, clustered at internal grain boundaries. Engineering solutions for defect reduction are identified: i)...

  • Thermal treatment effects imposed on solid DNA cationic lipid complex with hexadecyltrimethylammonium chloride, observed by variable angle spectroscopic ellipsometry. Nizioł, Jacek // Journal of Applied Physics;2014, Vol. 116 Issue 23, p234701-1 

    DNA cationic lipid complexes are materials of properties required for applications in organic electronics and optoelectronics. Often, their thermal stability demonstrated by thermogravimetry is cited in the literature as important issue. However, little is known about processes occurring in...

  • Synthesis, Spectroscopic and Docking Studies of Napthyl Substituted Di-Spiro Octahydroindolizine. Priya, R. Vishnu; Suresh, J.; Sivakumar, S.; Kumar, R. Ranjith; Sankaranarayanan, R. // Physical Review & Research International;Oct-Dec2013, Vol. 3 Issue 4, p479 

    The crystal structure of spiro[2.2"]acenaphthene-1"-onespiro[3.3']-5'-(naphthylmethylidine)- 1'-methylpiperidin-4'-one-4-(naphthyl)octahydroindolizine has been elucidated by modern spectroscopic technique including, ¹H and 13C NMR spectroscopy and unequivocally confirmed by single crystal...

  • Spectroscopic study of interaction of 1 H-1,2,4-triazoline-3-thione with molecular iodine. Chernovyants, M.; Aleshina, N.; Shcherbakov, I.; Starikova, Z. // Russian Journal of General Chemistry;May2013, Vol. 83 Issue 5, p986 

    The formation by 1 H-1,2,4-triazoline-3-thiones in dilute chloroform solution of n-σ*-complex with molecular iodine of the composition CHNS·I was studied by electronic spectroscopy in the UV and visible regions (log β = 2.14±0.05). By the XRD method the crystal and molecular...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics