Spherical curves design for micro-origami using intrinsic stress relaxation

Danescu, A.; Chevalier, C.; Grenet, G.; Regreny, Ph.; Letartre, X.; Leclercq, J. L.
March 2013
Applied Physics Letters;3/25/2013, Vol. 102 Issue 12, p123111
Academic Journal
Selective etching of pre-stressed multi-layered structures releases intrinsic stresses creating flexible microscopic shapes (rolls, spirals, tubes, etc.). A question of major interest is how to control design, composition, and etching process in order to obtain a prescribed macroscopic object? We report here the basic steps for (i) the mechanics of the fine curvature control, (ii) the object design and etching process, and we illustrate our approach by the design and fabrication of a three-dimensional device, two face-to-face spiral caps at optical wavelength scale.


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