Characteristics of thermally induced acoustic emission from nanoporous silicon device under full digital operation

Koshida, Nobuyoshi; Hippo, Daihei; Mori, Masamitsu; Yanazawa, Hiroshi; Shinoda, Hiroyuki; Shimada, Toshikazu
March 2013
Applied Physics Letters;3/25/2013, Vol. 102 Issue 12, p123504
Academic Journal
The resonance-free frequency response of the thermo-acoustic emission is demonstrated under a full digital drive. The device is composed of a thin-film heater electrode, a nano-porous silicon layer, and a single-crystalline silicon wafer. When sequential electrical pulse trains converted by the density modulation of an analog signal are introduced into the heater electrode, a significant sound pressure is reproduced with a sufficiently low distortion. The characteristic output behaviour in the audible ultrasonic band is clarified in either open- or closed-space. The advantageous features of thermally induced sound emission and its underlying physics have been made clear.


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