TITLE

Note: Alignment/focus dependent core-line sensitivity for quantitative chemical analysis in hard x-ray photoelectron spectroscopy using a hemispherical electron analyzer

AUTHOR(S)
Weiland, Conan; Browning, Raymond; Karlin, Barry A.; Fischer, Daniel A.; Woicik, Joseph C.
PUB. DATE
March 2013
SOURCE
Review of Scientific Instruments;Mar2013, Vol. 84 Issue 3, p036106
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
X-ray photoelectron spectroscopy is an established technique for quantitative chemical analysis requiring accurate peak intensity analysis. We present evidence of focus/alignment dependence of relative peak intensities for peaks over a broad kinetic energy range with a hemispherical electron analyzer operated in a position imaging mode. A decrease of over 50% in the Ag 2p3/2 to Ag 3d ratio is observed in a Ag specimen. No focus/alignment dependence is observed when using an angular imaging mode, necessitating the use of angular mode for quantitative chemical analysis.
ACCESSION #
86446698

 

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