TITLE

Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

AUTHOR(S)
Nazaretski, E.; Kim, Jungdae; Yan, H.; Lauer, K.; Eom, D.; Shu, D.; Maser, J.; Pesˇic, Z.; Wagner, U.; Rau, C.; Chu, Y. S.
PUB. DATE
March 2013
SOURCE
Review of Scientific Instruments;Mar2013, Vol. 84 Issue 3, p033701
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Synchrotron based x-ray microscopy established itself as a prominent tool for noninvasive investigations in many areas of science and technology. Many facilities around the world routinely achieve sub-micrometer resolution with a few instruments capable of imaging with the spatial resolution better than 100 nm. With an ongoing effort to push the 2D/3D resolution down to 10 nm in the hard x-ray regime both fabrication of the nano-focusing optics and stability of a microscope become extremely challenging. In this work we present our approach to overcome technical challenges on the path towards high spatial resolution hard x-ray microscopy and demonstrate the performance of a scanning fluorescence microscope equipped with the multilayer Laue lenses focusing optics.
ACCESSION #
86446660

 

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