13–30 micron diameter microdischarge devices: Atomic ion and molecular emission at above atmospheric pressures

Park, S.-J.; Eden, J. G.
November 2002
Applied Physics Letters;11/25/2002, Vol. 81 Issue 22, p4127
Academic Journal
Cylindrical microdischarge devices having cavity diameters as small as 13 μm and volumes as low as several nanoliters have been fabricated in metal/polymer structures with and without screen electrodes. These devices produce stable glow discharges in Ne, Xe, air, Xe/O[SUB2], and Ne/air mixtures at total pressures up to the maximum investigated, 1200 Torr. Neon discharges in 30 μm diameter devices are well behaved for p[SUBNe] above 700 Torr (pd>2.1 Torr cm) and generate strong emission in the UV from singly charged Ne-ion transitions at above-atmospheric pressures. Fluorescence in the visible from Xe[SUP+] and Xe[SUP2+] as well as molecular features in the green (~530 nm) and blue (~484 nm) that appear to be attributable to the neutral dimer are also observed from Xe in the 650-1100 Torr range. Discharges in air (100-740 Torr) and Ne/air mixtures produce strong N[SUB2](C → B) and N[SUP+,SUB2](B → X) emission in the near-UV and violet. The lowest observed operating voltage for Ne discharges in 30 μm devices is 87 V (p[SUBNe] = 1200 Torr). Discharges in microcavities of dimensions below 50μm represent a unique spectroscopic tool.


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