Ultrathin zirconium silicate gate dielectrics with compositional gradation formed by self-organized reactions

Watanabe, Heiji
November 2002
Applied Physics Letters;11/25/2002, Vol. 81 Issue 22, p4221
Academic Journal
Grain-boundary and crack effects on the dielectric response of high-permittivity films and ceramics were analyzed using the generalized effective-medium approximation. It was demonstrated that the brick-wall and coated spheres models, which become equivalent for a small porosity, best describe the strong reduction of the dielectric response and hardening of the soft-mode frequency recently revealed in SrTiO[SUB3] films and PbZrO[SUB3] ceramics.


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