Measurement of the roughness parameters with the use of an interference microscope

Moiseev, N.; Tselmina, I.
December 2012
Measurement Techniques;Dec2012, Vol. 55 Issue 9, p990
Academic Journal
A technique for the measurement of the roughness parameters of a polished surface in the nanometric range (nano-roughness) by means of a Linnik interference microscope with computer-aided interpretation of the interference patterns using the phase steps method is considered.


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