TITLE

Measurement of the roughness parameters with the use of an interference microscope

AUTHOR(S)
Moiseev, N.; Tselmina, I.
PUB. DATE
December 2012
SOURCE
Measurement Techniques;Dec2012, Vol. 55 Issue 9, p990
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A technique for the measurement of the roughness parameters of a polished surface in the nanometric range (nano-roughness) by means of a Linnik interference microscope with computer-aided interpretation of the interference patterns using the phase steps method is considered.
ACCESSION #
84088272

 

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