TITLE

Interaction of soft x-ray laser pulse radiation with aluminum surface: Nano-meter size surface modification

AUTHOR(S)
Ishino, Masahiko; Faenov, Anatoly; Tanaka, Momoko; Hasegawa, Noboru; Nishikino, Masaharu; Tamotsu, Satoshi; Pikuz, Tatiana; Inogamov, Nail; Zhakhovsky, Vasily; Skobelev, Igor; Fortov, Vladimir; Khohlov, Viktor; Shepelev, Vadim; Ohba, Toshiyuki; Kaihori, Takeshi; Ochi, Yoshihiro; Imazono, Takashi; Kawachi, Tetsuya
PUB. DATE
July 2012
SOURCE
AIP Conference Proceedings;7/12/2012, Vol. 1465 Issue 1, p236
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Interaction of soft x-ray laser radiation with material and caused modification of the exposed surface has both physical and practical interests. We irradiated the focusing soft x-ray laser (SXRL) pulses having a wavelength of 13.9 nm and the duration of 7 ps to aluminum (Al) surface. After the SXRL irradiation process, the irradiated Al surface was observed with a scanning electron microscope. The surface modifications caused by SXRL single pulse exposure were clearly seen. In addition, it was found that the conical structures having around 100 nm in diameters were formed in the shallow features. The nano-meter size modified structures at Al surface induced by SXRL pulse is interesting as the newly surface structure. Hence, the SXRL beam would be a candidate for a tool of micromachining. We also provide a thermomechanical modeling of SXRL interaction with Al briefly to explain the surface modification.
ACCESSION #
77657189

 

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