TITLE

Effects of Substrate Temperature on Properties of a-SiNx:H Films

AUTHOR(S)
Gungor, Tayyar; Tolunay, Huseyin
PUB. DATE
July 2002
SOURCE
Turkish Journal of Physics;2002, Vol. 26 Issue 4, p269
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the dark conductivity, photoconductivity, optical absorption coefficient and refractive index of a set of thin films. Effects of the substrate temperature on the electrical and optical properties of thin films; Description of the Constant Photocurrent Method; Basic equation for interference fringes.
ACCESSION #
7700869

 

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