Diffuse x-ray scattering from misfit dislocations in SiGe epitaxial layers with graded Ge content

Holý, V.; Li, J. H.; Bauer, G.; Schäffler, F.; Herzog, H.-J.
October 1995
Journal of Applied Physics;10/15/1995, Vol. 78 Issue 8, p5013
Academic Journal
Presents information on a study wherein a theory describing x-ray diffuse scattering from misfit dislocations in epitaxial layers was developed. Methods; Results; Discussion.


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