TITLE

Diffuse x-ray scattering from misfit dislocations in SiGe epitaxial layers with graded Ge content

AUTHOR(S)
Holý, V.; Li, J. H.; Bauer, G.; Schäffler, F.; Herzog, H.-J.
PUB. DATE
October 1995
SOURCE
Journal of Applied Physics;10/15/1995, Vol. 78 Issue 8, p5013
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents information on a study wherein a theory describing x-ray diffuse scattering from misfit dislocations in epitaxial layers was developed. Methods; Results; Discussion.
ACCESSION #
7663790

 

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