TITLE

Growth of epitaxial AlN(0001) on Si(111) by reactive magnetron sputter deposition

AUTHOR(S)
Ivanov, I.; Hultman, L.; Järrendahl, K.; Mårtensson, P.; Sundgren, J.-E.; Hjörvarsson, B.; Greene, J. E.
PUB. DATE
November 1995
SOURCE
Journal of Applied Physics;11/1/1995, Vol. 78 Issue 9, p5721
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study that examined the growth of epitaxial aluminum nitride(0001) on silicon(111) by reactive magnetron sputter deposition. Experimental procedure; Results and discussion; Conclusions.
ACCESSION #
7660040

 

Related Articles

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics