Dynamic sheath model of collisionless multispecies plasma immersion ion implantation

Qin, Shu; Jin, Zhijiang; Chan, Chung
July 1995
Journal of Applied Physics;7/1/1995, Vol. 78 Issue 1, p55
Academic Journal
Presents a dynamic sheath model for multispecies plasmas for the application of plasma immersion ion implantation (PIII). Determination of the sheath expansion during the pulse; Discussion on PIII; Discussion on theoretical assumptions of the model.


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