TITLE

X-ray reciprocal-space mapping of strain relaxation and tilting in linearly graded InAlAs buffers

AUTHOR(S)
Olsen, J. A.; Hu, E. L.; Lee, S. R.; Fritz, I. J.; Howard, A. J.; Hammons, B. E.; Tsao, J. Y.
PUB. DATE
April 1996
SOURCE
Journal of Applied Physics;4/1/1996, Vol. 79 Issue 7, p3578
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study which examined the extent of relaxation and orientation of linearly graded In[subx]Al[sub1-x]As buffers grown on gallium arsenide using a novel x-ray diffraction reciprocal-space mapping technique. Theoretical background; Description of the experimental setup; Results.
ACCESSION #
7658448

 

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