Quantitative study of the contribution of deep and shallow levels to the compensation mechanisms in annealed InP

Hirt, G.; Wolf, D.; Müller, G.
November 1993
Journal of Applied Physics;11/1/1993, Vol. 74 Issue 9, p5538
Academic Journal
Presents a study which investigated the effects of heat treatment under phosphorus atmosphere on the balance of electronic levels by capacitance-voltage (C-V) and deep level transient spectroscopy measurements. Preparation of samples and characterization techniques; Results and interpretation of C-V measurements; Discussion of the compensation mechanism in nominally undoped semi-insulating indium phosphide.


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