Thermal and ion-induced, metastable-cubic Al3M phases in Al-Ti and Al-Hf thin films

Hong, Q. Z.; Lilienfeld, D. A.; Mayer, J. W.
November 1988
Journal of Applied Physics;11/1/1988, Vol. 64 Issue 9, p4478
Academic Journal
Presents a study that examined the thermal and ion-induced reactions in codeposited, multilayer and bilayer aluminum-titanium and aluminum-hafnium thin films using transmission electron microscopy and Rutherford backscattering. Methodology; Analysis of the thermal annealing in the thin films; Evaluation of the ion mixing in the samples.


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