Shallow melting of thin heavily doped silicon layers by pulsed CO2 laser irradiation

James, R. B.; Christie, W. H.
May 1989
Journal of Applied Physics;5/1/1989, Vol. 65 Issue 9, p3655
Academic Journal
Presents information on a study which demonstrated the shallow melting of thin heavily doped silicon layers by pulsed carbon dioxide laser irradiation.


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