TITLE

Shallow melting of thin heavily doped silicon layers by pulsed CO2 laser irradiation

AUTHOR(S)
James, R. B.; Christie, W. H.
PUB. DATE
May 1989
SOURCE
Journal of Applied Physics;5/1/1989, Vol. 65 Issue 9, p3655
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents information on a study which demonstrated the shallow melting of thin heavily doped silicon layers by pulsed carbon dioxide laser irradiation.
ACCESSION #
7653999

 

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