Neutralization of phosphorus in polycrystalline silicon by hydrogenation

Sankara Narayanan, E. M.; Annamalai, S.; Sarma, G. H.; Iyer, Suman B.; Kumar, Vikram
April 1988
Journal of Applied Physics;4/15/1988, Vol. 63 Issue 8, p2867
Academic Journal
Presents information on a study which described the neutralization of phosphorus in silicon by hydrogenation. Measurement of changes in sheet resistance; Description of the polycrystalline films used in the measurements.


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