TITLE

Characterization of sputtered yttria-stabilized zirconia thin film and its application to a metal-insulator-semiconductor structure

AUTHOR(S)
Miyahara, Yuji
PUB. DATE
March 1992
SOURCE
Journal of Applied Physics;3/1/1992, Vol. 71 Issue 5, p2309
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports the characterization of sputtered yttria-stabilized zirconia (YSZ) thin film and its application to a metal-insulator-semiconductor structure. Background to the study; Experimental procedures; Structure of the YSZ film; Electrical characteristics of the YSZ film; Conclusion.
ACCESSION #
7652565

 

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