Characterization of sputtered yttria-stabilized zirconia thin film and its application to a metal-insulator-semiconductor structure

Miyahara, Yuji
March 1992
Journal of Applied Physics;3/1/1992, Vol. 71 Issue 5, p2309
Academic Journal
Reports the characterization of sputtered yttria-stabilized zirconia (YSZ) thin film and its application to a metal-insulator-semiconductor structure. Background to the study; Experimental procedures; Structure of the YSZ film; Electrical characteristics of the YSZ film; Conclusion.


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