TITLE

X-ray diffraction of nonuniform GexSi1-x/Si strained-layer superlattices

AUTHOR(S)
Li, J. H.; Mai, Z. H.; Cui, S. F.
PUB. DATE
June 1993
SOURCE
Journal of Applied Physics;6/1/1993, Vol. 73 Issue 11, p7955
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study which examined Ge[subx]Si[sub1-x]/Si strained-layer super lattices by means of double-crystal x-ray rocking curves. Discussion on the structural characterization of Ge[subx]Si[sub1-x]/Si heterostructures; Result of molecular beam epitaxy of the structures; Calculation of the theoretical simulation of super lattices.
ACCESSION #
7651837

 

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