TITLE

Structural properties of BaTiO3 thin films on Si grown by metalorganic chemical vapor deposition

AUTHOR(S)
Yoon, Y. S.; Kang, W. N.; Shin, H. S.; Yom, S. S.; Kim, T. W.; Lee, Jong Yong; Choi, D. J.; Baek, S-S.
PUB. DATE
February 1993
SOURCE
Journal of Applied Physics;2/1/1993, Vol. 73 Issue 3, p1547
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Focuses on a study which examined ferroelectric barium titanate thin films grown on silicon substrates by in situ metalorganic chemical vapor deposition. Description of barium titanate; Composition of the carrier gas; Details on the results.
ACCESSION #
7650483

 

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