Deposition of CaF2 and GaF3 on sulfur passivated GaAs(111)A, 100, and (111)B surfaces

Scimeca, T.; Muramatsu, Y.; Oshima, M.; Oigawa, H.; Nannichi, Y.; Ohno, T.
May 1992
Journal of Applied Physics;5/1/1992, Vol. 71 Issue 9, p4405
Academic Journal
Presents a study which investigated the interfacial chemical bonding for GaF[sub3] and CaF[sub2] deposited on S passivated gallium arsenide (111)A, 100, and (111)B surfaces. Experimental details; Results and discussion; Conclusions.


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