TITLE

Heat-source power requirements for high-quality recrystallization of thin silicon films for electronic devices

AUTHOR(S)
Miaoulis, Ioannis N.; Mikic, Bora B.
PUB. DATE
March 1986
SOURCE
Journal of Applied Physics;3/1/1986, Vol. 59 Issue 5, p1658
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes an approximate procedure for estimation of the power requirements for the melting and recrystallization of thin silicon films for electronic devices. Heat sources examined; Information on the silicon film melting process; Effect of the change of phase.
ACCESSION #
7648815

 

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