Heat-source power requirements for high-quality recrystallization of thin silicon films for electronic devices

Miaoulis, Ioannis N.; Mikic, Bora B.
March 1986
Journal of Applied Physics;3/1/1986, Vol. 59 Issue 5, p1658
Academic Journal
Describes an approximate procedure for estimation of the power requirements for the melting and recrystallization of thin silicon films for electronic devices. Heat sources examined; Information on the silicon film melting process; Effect of the change of phase.


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