Implantation of dopants into indium phosphide

Zeisse, Carl R.; Wilson, Robert G.; Hopkins, Craig G.
March 1985
Journal of Applied Physics;3/1/1985, Vol. 57 Issue 5, p1656
Academic Journal
Features a study that implanted seven donor elements and nine acceptors into liquid-encapsulated Czocharalski indium phosphide. Measurement of atom depth distributions with a Camera IMS 3f secondary ion mass spectrometer; Use of Pearson distribution; Effects of phosphorus on the discrepancy between theory and experiment.


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