Preparation and characteristics of ZnS thin films by intense pulsed ion beam

Shimotori, Yutaka; Yokoyama, Meiso; Isobe, Hironobu; Harada, Shigetoshi; Masugata, Katsumi; Yatsui, Kiyoshi
February 1988
Journal of Applied Physics;2/1/1988, Vol. 63 Issue 3, p968
Academic Journal
Presents a study that developed a deposition system for the preparation of zinc sulfide thin films by an intense pulsed ion beam. Extraction of an intensed pulse ion beam from a magnetically insulated diode with a geometrically insulated diode; Assumptions of the estimated deposition rate; Observation made on the x-ray diffraction pattern of the sintered zinc sulfide target.


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