TITLE

Homoepitaxial growth of diamond by an advanced hot-filament chemical vapor deposition method

AUTHOR(S)
Kondoh, Eiichi; Tanaka, Kenji; Ohta, Tomohiro
PUB. DATE
August 1993
SOURCE
Journal of Applied Physics;8/1/1993, Vol. 74 Issue 3, p2030
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Addresses the conditions for the epitaxial growth of diamond films grown by an advanced hot-filament chemical vapor deposition method. Application of optical microscopy and reflection high energy electron diffraction; Overview of the surface morphology of the films; Gas-phase chemistry for the window conditions.
ACCESSION #
7642201

 

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