Homoepitaxial growth of diamond by an advanced hot-filament chemical vapor deposition method

Kondoh, Eiichi; Tanaka, Kenji; Ohta, Tomohiro
August 1993
Journal of Applied Physics;8/1/1993, Vol. 74 Issue 3, p2030
Academic Journal
Addresses the conditions for the epitaxial growth of diamond films grown by an advanced hot-filament chemical vapor deposition method. Application of optical microscopy and reflection high energy electron diffraction; Overview of the surface morphology of the films; Gas-phase chemistry for the window conditions.


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