Secondary ion mass spectrometry without secondary ion emission. Recombinative scattering of hyperthermal Cs+ ions from a Si(111) surface adsorbed with water

Yang, M. C.; Lee, H. W.; Kang, H.
September 1995
Journal of Chemical Physics;9/22/1995, Vol. 103 Issue 12, p5149
Academic Journal
Collision of hyperthermal Cs+ ion beams with a Si(111) surface partially covered with water gives rise to emission of CsX+ cluster ions (X is a surface atom or molecule) even when the monomer X+ ions are not produced. The yield for atomic and cluster ion emission is examined as a function of Cs+ collision energy, based on which, we propose that CsX+ species are formed by recombination of the scattered, low kinetic energy Cs+ ions and the gaseous neutral species emanating from a surface. It is also demonstrated that under this condition the secondary neutral flux contains a large fraction of molecular units. © 1995 American Institute of Physics.


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