Effects on InP surface trap states of in situ etching and phosphorus-nitride deposition

Jeong, Yoon-Ha; Takagi, Shinichi; Arai, Fusako; Sugano, Takuo
September 1987
Journal of Applied Physics;9/15/1987, Vol. 62 Issue 6, p2370
Academic Journal
Studies the effects of in situ etching of indium phosphide (InP) surfaces with PCl[sub3] followed by low temperature in situ chemical vapor deposition of phosphorus-nitride in a phosphorus-rich ambiance. Experimental strategy of in situ etching followed by in situ deposition procedures; Characterization of phosphorus-nitride film; Profiling of compositions by Auger electron spectroscopy.


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