TITLE

Thin-film interactions in Si/SiO2/W-Ti/Al-1% Si system

AUTHOR(S)
Chang, Peng-Heng; Liu, Hung-Yu; Keenan, J. A.; Anthony, J. M.; Bohlman, J. G.
PUB. DATE
September 1987
SOURCE
Journal of Applied Physics;9/15/1987, Vol. 62 Issue 6, p2485
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Provides information on a study which investigated the thin-film metal-metal interactions in a silicon compound system using transmission electron microscopy, glancing angle x-ray diffraction, Rutherford backscattering spectrometry. Methods; Results; Discussion.
ACCESSION #
7638115

 

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