TITLE

Theoretical and practical aspects of collimated sputtering

AUTHOR(S)
Dew, S. K.
PUB. DATE
October 1994
SOURCE
Journal of Applied Physics;10/15/1994, Vol. 76 Issue 8, p4857
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the theoretical and practical implications of collimated sputtering. Geometrical factors and scaling dependences affecting bottom coverage, deposition rate, collimator lifetime and various nonuniformities; Role of gas scattering and its implications to collimated sputtering; Conclusions.
ACCESSION #
7637936

 

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