Theoretical and practical aspects of collimated sputtering

Dew, S. K.
October 1994
Journal of Applied Physics;10/15/1994, Vol. 76 Issue 8, p4857
Academic Journal
Examines the theoretical and practical implications of collimated sputtering. Geometrical factors and scaling dependences affecting bottom coverage, deposition rate, collimator lifetime and various nonuniformities; Role of gas scattering and its implications to collimated sputtering; Conclusions.


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