TITLE

Co diffusion and precipitation in Si/SiGe heterostructures

AUTHOR(S)
Dekempeneer, E. H. A.; Zalm, P. C.; Vriezema, C. J.; van den Heuvel, R. A.
PUB. DATE
October 1991
SOURCE
Journal of Applied Physics;10/15/1991, Vol. 70 Issue 8, p4263
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study that demonstrated cobalt diffusion and precipitation in silicon/silicon germanide heterostructures. Procedures in the preparation of a sample grown by molecular-beam epitaxy; Description of the germanium-implanted samples produced; Analysis of the secondary-ion mass spectrometry measurements of the cobalt depth distribution.
ACCESSION #
7637782

 

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