Enhancement of oxygen precipitation in quenched Czochralski silicon crystals

Hara, Akito; Fukuda, Tetsuo; Miyabo, Toru; Hirai, Iesada
October 1989
Journal of Applied Physics;10/15/1989, Vol. 66 Issue 8, p3958
Academic Journal
Presents a study that investigated the effect of cooling rates from solution annealing on oxygen precipitation in Czochralski silicon crystals. Methodology; Determination of the amount of oxygen precipitation at different cooling rates; Measurement of the amount of oxygen precipitated for samples prepared by different annealing processes.


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