TITLE

Transport and optical properties of AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures subjected to CH4/H2 reactive ion etching

AUTHOR(S)
van Es, C. M.; Eijkemans, T. J.; Wolter, J. H.; Pereira, R.; Van Hove, M.; Van Rossum, M.
PUB. DATE
November 1993
SOURCE
Journal of Applied Physics;11/15/1993, Vol. 74 Issue 10, p6242
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents information on a study which investigated the effect of methane/hydrogen reactive ion etching and a subsequent annealing process on AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures. Electrical properties of the heterostructures; Experimental details; Results and discussion; Conclusions.
ACCESSION #
7637213

 

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