Transport and optical properties of AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures subjected to CH4/H2 reactive ion etching

van Es, C. M.; Eijkemans, T. J.; Wolter, J. H.; Pereira, R.; Van Hove, M.; Van Rossum, M.
November 1993
Journal of Applied Physics;11/15/1993, Vol. 74 Issue 10, p6242
Academic Journal
Presents information on a study which investigated the effect of methane/hydrogen reactive ion etching and a subsequent annealing process on AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures. Electrical properties of the heterostructures; Experimental details; Results and discussion; Conclusions.


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