Performance characteristics of the ArF excimer laser using a low-pressure argon-rich mixture

Suda, Akira; Obara, Minoru; Noguchi, Akira
November 1986
Journal of Applied Physics;11/15/1986, Vol. 60 Issue 10, p3791
Academic Journal
Examines the low-pressure operation of an electron (e)-beam excited argon fluorine (ArF) laser and krypton fluorine. Intrinsic efficiency of the ArF laser energy; Time histories of the e-beam current; Overview of the laser mixture and pulsewidth.


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