Nucleation of diamond during hot filament chemical vapor deposition

Singh, Jogender; Vellaikal, M.
March 1993
Journal of Applied Physics;3/15/1993, Vol. 73 Issue 6, p2831
Academic Journal
Presents a study that investigated the mechanism of nucleation of diamond during hot filament chemical vapor deposition (HFCVD) process by high resolution transmission electron microscopy. Nucleation and growth characteristics of crystalline diamond; Details on the steps involved during the HFCVD process; Evidence for the formation of a diamond-like amorphous carbon with small diamond microcrystallites.


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