Surface passivation of GaAs with P2S5-containing solutions

Wang, Yun; Darici, Yesim; Holloway, Paul H.
March 1992
Journal of Applied Physics;3/15/1992, Vol. 71 Issue 6, p2746
Academic Journal
Examines the surface chemistry of gallium arsenide (GaAs) passivated wih P[sub2]S[sub5] solutions modified with sulfur and other sulfides. Reason for the interest in surface passivation of GaAs; Measurement of the degree of passivity achieved; Collection of room-temperature photoluminescence data.


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