TITLE

Laser photodissociation of chlorine and methyl chloride on low-temperature silicon substrates

AUTHOR(S)
Kawasaki, Masahiro; Sato, Hiroyasu; Nishi, Nobuyuki
PUB. DATE
January 1989
SOURCE
Journal of Applied Physics;1/15/1989, Vol. 65 Issue 2, p792
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study which investigated laser photodissociation of chlorine and methyl chloride on low-temperature silicon substrates. Equation for the translational energy distribution used to estimate the number of effective modes based on phase-space theory; Analysis of photodesorption of parent molecules; Effect of substrates on photodissociation of Cl[sub2].
ACCESSION #
7630339

 

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