Laser photodissociation of chlorine and methyl chloride on low-temperature silicon substrates

Kawasaki, Masahiro; Sato, Hiroyasu; Nishi, Nobuyuki
January 1989
Journal of Applied Physics;1/15/1989, Vol. 65 Issue 2, p792
Academic Journal
Presents a study which investigated laser photodissociation of chlorine and methyl chloride on low-temperature silicon substrates. Equation for the translational energy distribution used to estimate the number of effective modes based on phase-space theory; Analysis of photodesorption of parent molecules; Effect of substrates on photodissociation of Cl[sub2].


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