Optical emission spectroscopy of ArF-laser-irradiated disilane-acetylene mixtures for 3C-SiC epitaxial growth

Mizunami, Toru; Toyama, Naotake; Uemura, Takayuki
February 1993
Journal of Applied Physics;2/15/1993, Vol. 73 Issue 4, p2024
Academic Journal
Deals with the optical emission spectroscopy of ArF laser-irradiated disilane-acetylene mixtures for 3C silicon carbide (SiC) epitaxial growth. Characterization of SiC materials; Details of the experimental techniques used; Explanation for the formation of CH and C[sub2] radicals in disilane-acetylene mixtures.


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