Metal/intrinsic semiconductor/semiconductor field effect transistor fabricated from polycrystalline diamond films

Nishimura, Kozo; Kumagai, Kazuo; Nakamura, Rie; Kobashi, Koji
December 1994
Journal of Applied Physics;12/15/1994, Vol. 76 Issue 12, p8142
Academic Journal
Presents a study which facbricated a metal/intrinsic semiconductor/semiconductor field effect transistor using polycrystalline diamond films grown by microwave plasma chemical vapor deposition. Fabrication process; Results and discussion; Conclusion.


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