TITLE

Etching polymer films with ultraviolet laser pulses of long (10–400 μs) duration

AUTHOR(S)
Srinivasan, R.
PUB. DATE
August 1992
SOURCE
Journal of Applied Physics;8/15/1992, Vol. 72 Issue 4, p1651
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study that examined the etching of polymer thin films with ultraviolet laser radiation. Methodology; Correlation between etch depth and fluence in the etching of polyethylene terephthalate by laser pulses; Examination of the etched holes.
ACCESSION #
7626826

 

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