X-ray diffraction measurement of partially correlated interfacial roughness in multilayers

Phang, Y. H.; Savage, D. E.; Kariotis, R.; Lagally, M. G.
September 1993
Journal of Applied Physics;9/1/1993, Vol. 74 Issue 5, p3181
Academic Journal
Presents a study which demonstrated the existence of partially correlated roughness in multilayer thin films by x-ray diffraction diffuse-intensity distribution measurements. Experimental details; Results and discussion; Conclusion.


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