Preparation of textured diamond films on Si substrates by hot-filament chemical-vapor deposition

Ikoma, Keiko; Yamanaka, Mitsugu
September 1993
Journal of Applied Physics;9/1/1993, Vol. 74 Issue 5, p3519
Academic Journal
Presents information on a study which deposited diamond on silicon(111) substrates by a two-step hot-filament chemical vapor deposition method consisting of the pretreatment and growth processes. Experimental procedure; Characterization of the products by scanning electron microscopy; Formation of SiC and the nucleation of diamond.


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