TITLE

UHV environments require more from motion systems

AUTHOR(S)
Zeman, Milan; Titus, Jay
PUB. DATE
May 2012
SOURCE
Laser Focus World;May2012, Vol. 48 Issue 5, p39
SOURCE TYPE
Periodical
DOC. TYPE
Article
ABSTRACT
The article discusses the importance of modifying motion systems to manipulate optics, particle beams, and measurement devices in ultrahigh-vacuum (UHV) environments. It explores different critical design features, appropriate selection, as well as material preparation for both standard and UHV qualified devices. Furthermore, it suggests he need to evaluate and control all aspects of mechanical design, selection, and fabrication of actual actuators to ensure accuracy of their applications.
ACCESSION #
76121293

 

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